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May 21, 2024
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ECGR 6104 - Fabrication of Nanomaterials
Lithographic methods (CVD, PVD, e-beam, ion beam, magnetron, evaporation, spin coating, mask fabrication, developing resists); microelectromechanical systems and nanoelectromechanical systems; limits of conventional mechanical processing, electroforming, growth mechanisms (organic, inorganic, thermal); powders.
Credit Hours: (3)
Restriction(s): Credit will not be awarded for ECGR 6104 where credit has been awarded for ECGR 8104, MEGR 7104, or MEGR 8104.
Prerequisite(s): NANO 8101 or permission of instructor.
Cross-listed Course(s): ECGR 8104 , MEGR 7104 , and MEGR 8104 .
Schedule of Classes
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